Figure 1From: Hybrid FIB milling strategy for the fabrication of plasmonic nanostructures on semiconductor substrates Optical Performance of FIB patterned LED. (a) LED emission intensity as a function of the FIB exposure dose. (b) Optical image of the LED patterned with box mills of different 30 kV FIB doses. LEDs used for milling have been provided by OSRAM Opto-Semiconductors.Back to article page