Table 1 Sample details
Sample code | ||||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|
S1 | S2 | S3 | S4 | S5 | S6 | S7 | S8 | S9 | S10 | S11 | S12 | |
Substrate | Ge | GaAs | Si | Ge | Ge | Ge | Ge | Ge | Ge | Ge | Ge | Ge |
T sub (°C) | 70 | 70 | 70 | 70 | 70 | 70 | 70 | 70 | 70 | 27 | 110 | 150 |
Mn (%) | 12 | 12 | 12 | 12 | 12 | 7 | 8.5 | 10 | 14 | 12 | 12 | 12 |
Ge (nm) | 11 | 11 | 11 | 11 | 4.6 | 11 | 11 | 11 | 11 | 11 | 11 | 11 |
GeMn (nm) | 3 | 3 | 3 | 1.2 | 3 | 3 | 3 | 3 | 3 | 3 | 3 | 3 |