Table 1 Results of the facet analysis for SiGe island formed at high temperatures, listing all experimentally observed {hkl} island facets with the corresponding experimental and theoretical values θ and φ as well as the facet area relative to {111}.
From: Ultra-steep side facets in multi-faceted SiGe/Si(001) Stranski-Krastanow islands
Facet | θ th(°) | θ exp(°) | φ th(°) | φ exp(°) | Also occurs for | Facet area relative to {111} (%) |
|---|---|---|---|---|---|---|
{105} | P, D, B | |||||
{5 3 15} | 21.2 | 21.8 ± 0.1 | 30.1 | 29.1 ± 0.3 | * | 21 ± 1 |
{113} | 25.2 | 25.1 ± 0.1 | 45.0 | 45.0 ± 0.2 | D, B | 77 ± 4 |
{15 3 23} | 33.6 | 33.9 ± 0.1 | 11.3 | 11.6 ± 0.1 | D, B | 44 ± 2 |
{558} | 41.5 | 41.6 ± 0.5 | 45.0 | 44.9 ± 0.4 | * | 19 ± 1 |
{20 4 23} | 41.7 | 40.7 ± 0.1 | 11.3 | 11.6 ± 0.2 | B | 35 ± 2 |
{313} | 46.5 | 46.6 ± 0.2 | 18.4 | 17.4 ± 0.2 | * | 29 ± 1 |
{23 4 20} | 49.4 | 49.3 ± 0.2 | 9.9 | 10.4 ± 0.2 | B | 23 ± 12 |
{715} | 54.7 | 54.7 ± 0.2 | 8.1 | 8.2 ± 0.1 | * | 62 ± 3 |
{111} | 54.7 | 54.7 ± 0.1 | 45.0 | 45.0 ± 0.1 | B | 100 ± 7 |
{322} | 61.0 | 61.7 ± 0.6 | 33.7 | 33.0 ± 0.3 | * | 32 ± 2 |
{12 3 5} | 68.0 | 67.4 ± 0.4 | 14.0 | 14.7 ± 0.2 | * | 53 ± 2 |