Figure 1From: SiO x /SiN y multilayers for photovoltaic and photonic applicationsXRD spectra of annealed Si-based MLs. (curve 1) SiO x /SiO2 1 h, 1,100°C; (curve 2) SiO x /SiN y 1 h, 1,100°C; (curve 3) SiO x /SiN y 1 min, 1,000°C; and (curve 4) SiO x /SiO2 1 min, 1,000°C.Back to article page