Table 1 Details of the experimental conditions
From: Effects of process parameters on sheet resistance uniformity of fluorine-doped tin oxide thin films
Variable parameters | Unit | Value | Fixed parameters | Unit | Value |
---|---|---|---|---|---|
Working pressure | mTorr | 5 | Sample area | cm2 | 16 × 34 |
7.5 | |||||
10 | |||||
12.5 | |||||
15 | |||||
H 2 flow rate | sccm | 5.2 | |||
Bubbler pressure | Torr | 40.2 | O 2 flow rate | sccm | 36.4 |
43.3 | |||||
45.7 | |||||
60.6 | |||||
TMT flow rate | sccm | 3.6 | |||
SF 6 flow rate | sccm | 12.46 | |||
Ar flow rate | sccm | 12.18 | |||
Deposition time | min | 15 |