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Table 1 Details of the experimental conditions

From: Effects of process parameters on sheet resistance uniformity of fluorine-doped tin oxide thin films

Variable parameters

Unit

Value

Fixed parameters

Unit

Value

Working pressure

mTorr

5

Sample area

cm2

16 × 34

  

7.5

   
  

10

   
  

12.5

   
  

15

   
   

H 2 flow rate

sccm

5.2

Bubbler pressure

Torr

40.2

O 2 flow rate

sccm

36.4

  

43.3

   
  

45.7

   
  

60.6

   
   

TMT flow rate

sccm

3.6

   

SF 6 flow rate

sccm

12.46

   

Ar flow rate

sccm

12.18

   

Deposition time

min

15

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