Figure 5

The input photon-to-current conversion efficiency [IPCE] spectrum current density-voltage characteristics. IPCE spectrum current density-voltage characteristics of solar cells with 200-nm thick planar-a-Si:H film, 200-nm thick a-Si:H nanocone, 200-nm thick a-Si:H nanocone with 10-min H₂ plasma treatment, and 200-nm thick a-Si:H nanocone and additional 10-nm a-SiH layer after 10-min H₂ plasma treatment. P⁺/I nanocone + H₂ plasma/N⁺, black square; PI/N⁺ planar, red circle; P⁺/I nanocone/N⁺, blue triangle; P⁺/I nanocone + H₂ plasma + 10 nm/N⁺, green inverted triangle.