3D simulation of morphological effect on reflectance of Si3N4 sub-wavelength structures for silicon solar cells

Table 1 Summary of the average reflectance of Si₃N₄ SWS with various incident angles

Average reflectance (%)	0°	15°	30°	45°	60°
Cylinder shape	6.86	6.70	9.95	23.13	52.78
Circular cone shape	4.42	3.64	7.79	26.68	50.98
Square pyramid shape	3.47	3.15	8.88	24.40	51.44