Figure 4From: Non-equidistant scanning approach for millimetre-sized SPM measurementsLocal refinement process on different surfaces. Topography of (1) 2D calibration grating, (2) microchip surface and (3) solar cell front surface together with areas where the z precision criterion failed and a refinement needs to be planned (black color) for three successive levels of iterative process (A, B, C).Back to article page