Account

Table 1 Parameters of Equation 2

From: Early stages of growth of gold layers sputter deposited on glass and silicon substrates

Substrate	j	N	f
Substrate	(10¹⁵ cm⁻² s⁻¹)	(10¹⁵ cm⁻²)
Glass	2.00 ± 0.02	59.70 ± 3.0	0.59 ± 0.02
Si	2.16 ± 0.02	28.9 ± 7.5	0.92 ±0.02

Obtained by NLSQ fitting of measured dependences of the mean layer thickness on the deposition time (see Figure 1).

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