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Table 2 Widths of gold signal calculated as central second moment of measured distribution (see Figure 4 )

From: Early stages of growth of gold layers sputter deposited on glass and silicon substrates

Sputtering time

(s)

Glass substrate

Si substrate

σ

S

σ

S

(keV)

(1015at.cm−2)

(keV)

(1015at.cm−2)

5

4.6

53

2.9

34

10

4.8

55

3.0

35

15

3.2

37

3.2

37

20

3.3

38

3.2

37

  1. Typical statistical error is below 10 %.

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