Table 2 Widths of gold signal calculated as central second moment of measured distribution (see Figure 4 )
From: Early stages of growth of gold layers sputter deposited on glass and silicon substrates
Sputtering time (s) | Glass substrate | Si substrate | ||
---|---|---|---|---|
σ | S | σ | S | |
(keV) | (1015at.cm−2) | (keV) | (1015at.cm−2) | |
5 | 4.6 | 53 | 2.9 | 34 |
10 | 4.8 | 55 | 3.0 | 35 |
15 | 3.2 | 37 | 3.2 | 37 |
20 | 3.3 | 38 | 3.2 | 37 |