Table 3 Chemical composition of ZnS films deposited at various substrate temperatures
From: Structural and optical properties of ZnS thin films deposited by RF magnetron sputtering
Substrate temperature (°C) | Zn (atomic %) | S (atomic %) | Zn/S ratio |
---|---|---|---|
100 | 54.32 | 45.68 | 1.19 |
200 | 53.87 | 46.13 | 1.17 |
250 | 53.75 | 46.25 | 1.16 |
300 | 52.95 | 47.05 | 1.13 |
350 | 49.91 | 50.09 | 0.99 |
400 | 50.97 | 49.03 | 1.04 |