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Table 3 Chemical composition of ZnS films deposited at various substrate temperatures

From: Structural and optical properties of ZnS thin films deposited by RF magnetron sputtering

Substrate temperature (°C) Zn (atomic %) S (atomic %) Zn/S ratio
100 54.32 45.68 1.19
200 53.87 46.13 1.17
250 53.75 46.25 1.16
300 52.95 47.05 1.13
350 49.91 50.09 0.99
400 50.97 49.03 1.04