Figure 1From: Enhancement of intrinsic emission from ultrathin ZnO films using Si nanopillar templateThe fabrication processes of ZnO/Si nanopillar heterostructures (not to scale). ( a) Size distribution of Ag islands. ( b) Dry etching process. ( c) Formation of Si nanopillars. ( d) Deposition of ZnO films on the Si nanopillar surface by ALD.Back to article page