Figure 2From: Relation between electrical properties of aerosol-deposited BaTiO3 thin films and their mechanical hardness measured by nano-indentationCross-sectional SEM micrographs of 0.2-μm-thick BaTiO 3 thin films on (a) Cu and (b) SUS substrates. Enlarged cross-sectional SEM micrographs of the films on (c) Cu and (d) SUS substrates.Back to article page