Figure 4From: Relation between electrical properties of aerosol-deposited BaTiO3 thin films and their mechanical hardness measured by nano-indentationSurface SEM micrographs. Surface SEM micrographs of 0.2-μm-thick BaTiO3 thin film on (a) Cu and (b) SUS substrates and 2-μm-thick BaTiO3 thick films on (c) Cu and (d) SUS substrates.Back to article page