Figure 5From: Relation between electrical properties of aerosol-deposited BaTiO3 thin films and their mechanical hardness measured by nano-indentationLoad–displacement curve and thickness dependence of surface hardness of BaTiO 3 films. P-h curves of BaTiO3 films on (a) Cu and (b) SUS substrates for a load force of 900 μN and the thickness dependence of surface hardness of the films on (c) Cu and (d) SUS substrates.Back to article page