Table 1 The statistical results of dot diameters, heights and densities for four samples
Samples | Layers | Dot diameter (nm) | Dot height (nm) | Dot density(/cm2) | |||
---|---|---|---|---|---|---|---|
Large dot | Small dot | Large dot | Small dot | Large dot | Small dot | ||
Sample A | 1 | 64 ± 5 | 40 ± 7 | 6.6 ± 0.8 | 1.5 ± 0.4 | (1.2 ± 0.3) × 109 | (1.2 ± 0.5) × 1010 |
Sample B | 2 | 73 ± 6 | 38 ± 8 | 8.8 ± 0.6 | 2.4 ± 0.6 | (3.9 ± 0.5) × 109 | (1.2 ± 0.5) × 1010 |
Sample C | 1 | 44 ± 6 | 27 ± 7 | 5.2 ± 0.7 | 1.5 ± 0.5 | (2.0 ± 0.4) × 109 | (6.4 ± 0.9) × 1010 |
Sample D | 2 | 47 ± 6 | 26 ± 8 | 5.0 ± 0.9 | 1.4 ± 0.5 | (2.0 ± 0.4) × 109 | (7.8 ± 1.0) × 1010 |