Figure 4From: Structure and electrical properties of sputtered TiO2/ZrO2 bilayer composite dielectrics upon annealing in nitrogenHigh-frequency (1 MHz) capacitance-voltage curves for TiO 2 /ZrO 2 /Si thin films. The inverted triangle represents the as-deposited sample; square, the sample annealed at 573 K; circle, the sample annealed at 773 K; and triangle, the sample annealed at 973 K.Back to article page