Table 1 HF and water concentrations in the various electrolytes used
From: Analysis of p-Si macropore etching using FFT-impedance spectroscopy
2.5 wt.% HF | 5 wt.% HF | 7.5 wt.% HF | 10 wt.% HF | |||||
---|---|---|---|---|---|---|---|---|
HF (wt.%) | 48 | 73 | 48 | 73 | 48 | 73 | 48 | 73 |
H2O (wt.%) | 2.7 | 0.7 | 5.4 | 1.5 | 8.1 | 2.5 | 11 | 3.8 |