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Table 1 HF and water concentrations in the various electrolytes used

From: Analysis of p-Si macropore etching using FFT-impedance spectroscopy

 

2.5 wt.% HF

5 wt.% HF

7.5 wt.% HF

10 wt.% HF

HF (wt.%)

48

73

48

73

48

73

48

73

H2O (wt.%)

2.7

0.7

5.4

1.5

8.1

2.5

11

3.8

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