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Table 2 Comparison of metrological properties of different systems

From: Voice coil-based scanning probe microscopy

System

Movement (nm)

Rotation (μ rad)

CRB stage

0.4

0.005

Flexure stage

3.8

0.45

Commercial SPM

2

2

Stack piezo

27

40

  1. Comparison of parasitic motion and rotation error for different actuators. Note that for the CRB stage, the parasitic motion could not be measured, as the system could not be disassembled; the values are taken from a single stage datasheet. For the flexure stage, it was measured with one axis fixed. For the commercial SPM, the estimate is taken from AFM measurements of a calibration standard.
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