Figure 3From: Room light anodic etching of highly doped n-type 4 H-SiC in high-concentration HF electrolytes: Difference between C and Si crystalline facesMeasured potential during the initiation of the pores. The initiation was carried out for a fixed current density of 25.5 mA/cm2 in the case of SiC (C and Si faces). Two samples were etched using the same conditions. As a comparison, the curve for a highly doped silicon wafer is also shown. The samples #1, #2 and #3, #4 are identical.Back to article page