Skip to main content

Table 1 Thickness and composition of deposited layers

From: Porous silicon bulk acoustic wave resonator with integrated transducer

   Nominal Impedance Longitudinal
Function Material thickness (nm) (MRayl) velocity (ms 1)
Top electrode AlCu 130 17 6,420
  W 120 101 5,230
Piezo layer AlN 1300 37 10,400
Bottom electrode W 170 101 5,230
  AlCu 200 17 6,420
Coupling layer SiO2 500 13 5,970
Seal to PSi Amorphous Si 20 20 8,400
Porous layer/multilayers PSi variable variable variable