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Table 2 Deviation of the Si wall thicknesses and channel characteristics for the fabricated triple-cavity PhC

From: Multi-channel Si-liquid crystal filter with fine tuning capability of individual channels for compensation of fabrication tolerances

m

dSi +  dair(nm)

dSi± δ dSi(nm)

±Δ λc 1(nm)

±Δ λc 2(nm)

±Δ λc 3(nm)

λ s  ± Δ λs 12(nm) λ s  ± Δ λs 23(nm)

1

1,400

325 ± 35

−22

−46.8

−18.5

153.3 − 24.3

  

(± 10.8 %)

   

153.3 + 27.7

2

900

360 ± 20

+12.5

+7.7

+12.5

43 − 6

  

(± 5.6 %)

   

43 + 6

3

900

486 ± 20

+4

+5.6

+5.3

20 − 1

      

20 + 2

  

(± 4 %)

    

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