Figure 3From: Effective surface oxidation of polymer replica molds for nanoimprint lithographyFE-SEM images of NOA63 replica mold surfaces oxidized by basic oxidative treatment. Representative FE-SEM images of NOA63 replica mold surfaces oxidized by basic oxidative treatment for (a) 5, (b) 10, (c) 15, and (d) 30 min.Back to article page