Figure 4From: Effective surface oxidation of polymer replica molds for nanoimprint lithographyWater contact angles of the PDMS-coated NOA63 replica molds. Prior to silanization and PDMS coating, the molds were oxidized by UV radiation for (a) 0, (b) 1, (c) 2, (d) 5, and (e) 8 min and by basic oxidative treatment for (f) 2, (g) 5, (h) 10, and (i) 30 min. The contact angle values are plotted as a function of oxidation time.Back to article page