Figure 5From: High performance surface-enhanced Raman scattering substrates of Si-based Au film developed by focused ion beam nanofabricationSERS spectra of 10β6βmol/L R6G for the parameter-dependent substrates. (a) SERS spectra, (b) micrographs of A_1 with 15-nm gold film, (c) micrographs of A_2 with 15-nm gold film, (d) micrographs of A_3 with 15-nm gold film. Barβ=β500nm.Back to article page