Figure 1From: Silicon-based photonic crystals fabricated using proton beam writing combined with electrochemical etching methodSchematic cross-section view of 2D photonic lattice fabrication on silicon substrate. (a) Proton beam-writing process and resultant defect distribution. (b) Selective formation of porous silicon in subsequent electrochemical etching in HF electrolyte. (c) Removal of porous silicon in KOH solution.Back to article page