Table 2 Dimensions (μm), resistance (Ω), and resistivity (Ω·m) of the three patterns
From: Evaluation of mesoporous silicon thermal conductivity by electrothermal finite element simulation
Th (μm) | W(μm) | L(μm) | R(Ω) at 30°C | ρ(Ω·m) at 30°C | |
|---|---|---|---|---|---|
W10 | 0.94 | 9.4 | 1,100 | 4.053 | 3.26 × 10−8 |
W30 | 0.94 | 29.5 | 1,100 | 1.307 | 3.30 × 10−8 |
W50 | 0.94 | 49 | 1,100 | 0.796 | 3.33 × 10−8 |