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Table 1 Sheet resistance and resistivity of a-Si thin film before and after annealing

From: Crystallization of amorphous silicon thin films deposited by PECVD on nickel-metalized porous silicon

Sample

Sheet resistanceRs (kΩ)

Resistivity ρ (Ω cm)

a-Si/PS

193.36

6.148

Annealed a-Si/PS

1.515

0.048

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