Table 1 Source and drain capacitance for multiple substrate insulator thickness
| Substrate insulator thickness (nm) | C sbor C db(aF) | I ds(μA) at V G = 1 V |
|---|---|---|
| 10 | 34.53 | 47.395 |
| 50 | 6.906 | 47.340 |
| 100 | 3.453 | 47.272 |
| 200 | 1.727 | 47.135 |
| 300 | 1.151 | 46.998 |
| 400 | 0.863 | 46.860 |
| 500 | 0.691 | 46.723 |
