Table 1 Source and drain capacitance for multiple substrate insulator thickness
Substrate insulator thickness (nm) | C sbor C db(aF) | I ds(μA) at V G = 1 V |
---|---|---|
10 | 34.53 | 47.395 |
50 | 6.906 | 47.340 |
100 | 3.453 | 47.272 |
200 | 1.727 | 47.135 |
300 | 1.151 | 46.998 |
400 | 0.863 | 46.860 |
500 | 0.691 | 46.723 |