Table 1 Q max ( f Qmax ) of inductors integrated on localized PS and full PS sheet
From: RF performances of inductors integrated on localized p+-type porous silicon regions
Inductor design | 100-μm PS | 200-μm PS | ||||
---|---|---|---|---|---|---|
Surface ratios | Localized PS | Full PS sheet | Surface ratios | Localized PS | Full PS sheet | |
Qmax (fQmax GHz) | Qmax (fQmax GHz) | Qmax (fQmax GHz) | Qmax (fQmax GHz) | |||
W10N55R30 | 0.12 | 4.7 (2.6) | 7.2 (4.7) | 0.07 | 6.9 (3.4) | 8.7 (5.4) |
W10N55R80 | 0.13 | 5.3 (2.3) | 6.3 (3) | 0.08 | - | 7.8 (3.2) |
W30N15R80 | 0.12 | 9.1 (4.2) | 12.1 (8.4) | 0.07 | 12.4 (5.3) | 22 (12) |
W30N35R130 | 0.22 | 4.1 (2.2) | 6.3 (3.7) | 0.15 | 4.1 (1.9) | 7.7 (4) |
W50N15R78 | 0.18 | 9.4 (3.8) | 10.6 (6.6) | 0.11 | 11 (4.6) | 17.5 (8) |
W50N35R30 | 0.3 | - | 6 (2.3) | 0.21 | 4 (1.2) | 7.5 (3) |
W50N55R175 | 0.38 | 3.11 (0.4) | 3.8 (0.6) | 0.3 | - | - |