Figure 1
From: Three-dimensional AlZnO/Al2O3/AlZnO nanocapacitor arrays on Si substrate for energy storage
Schematic diagrams of fabrication processes for three-dimensional AZO/Al 2 O 3 /AZO nanocapacitor arrays. (a) The formation of AAO templates on the Si substrate, (b) atomic layer deposition of the AZO/Al2O3/AZO stack (defined as MIM structure), and (c) the formation of capacitors for electrical measurements, including three-dimensional nanocapacitor arrays and a top contact layer of Ta film.