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Figure 1 | Nanoscale Research Letters

Figure 1

From: Three-dimensional AlZnO/Al2O3/AlZnO nanocapacitor arrays on Si substrate for energy storage

Figure 1

Schematic diagrams of fabrication processes for three-dimensional AZO/Al 2 O 3 /AZO nanocapacitor arrays. (a) The formation of AAO templates on the Si substrate, (b) atomic layer deposition of the AZO/Al2O3/AZO stack (defined as MIM structure), and (c) the formation of capacitors for electrical measurements, including three-dimensional nanocapacitor arrays and a top contact layer of Ta film.

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