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Table 1 Size, density of dots, and surface RMS roughness values are presented at different fluences

From: Role of surface composition in morphological evolution of GaAs nano-dots with low-energy ion irradiation

Fluence (ions/cm2) Size of dots (nm) RMS roughness (nm) Density (dots/cm2)
Pristine - 0.2 -
1 × 1017 18.4 ± 2.2 0.5 8 × 1010
3 × 1017 32.6 ± 2.2 0.6 2.8 × 1010
7 × 1017 24.6 ± 2.2 0.3 5.8 × 1010
  1. RMS, root-mean-square.