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Table 1 Size, density of dots, and surface RMS roughness values are presented at different fluences

From: Role of surface composition in morphological evolution of GaAs nano-dots with low-energy ion irradiation

Fluence (ions/cm2)

Size of dots (nm)

RMS roughness (nm)

Density (dots/cm2)

Pristine

-

0.2

-

1 × 1017

18.4 ± 2.2

0.5

8 × 1010

3 × 1017

32.6 ± 2.2

0.6

2.8 × 1010

7 × 1017

24.6 ± 2.2

0.3

5.8 × 1010

  1. RMS, root-mean-square.
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