Figure 4

X-ray nanospot simulation of a scan over a SiGe DMs. (a) shows the beam spot positions given by the weighting factors w _n within the plane of the modelled sample surface. The SiGe dots (red) grown around a pit (grey) are also sketched within (a). Weighting factors w _n multiplied by the y-component of the internal displacement field are shown in (b) and reveal the parts of the displacement field that are contributing to the simulation. (c) shows the simulated diffraction image near SiGe(004) reflection at the corresponding spot position shown in (a).