Figure 6From: Scanning X-ray nanodiffraction: from the experimental approach towards spatially resolved scattering simulationsSiGe(004) reflection acquired in a nanodiffraction experiment on SiGe/Si(001) DMs. The 2D detector frame shows the crystal truncation rod (CTR) of the (001) surface and the diffuse intensity with positional correlation peaks around the SiGe(004) reflection (SiGe).Back to article page