Figure 6
From: Non-oxidized porous silicon-based power AC switch peripheries
Cross-sectional SEM images of porous silicon layers formed after the anodization of the experimental wafer: (a) overall view, Piso-PS and Pbase-PS indicate the porous silicon layers formed from the Piso and Pbase diffusions, respectively; (b) focus on the frontier between Piso-PS and Pbase-PS areas; (c) morphology of the Piso-PS layer; (d) morphology of the Pbase-PS layer.