Table 2 Oxidation states of the SiO x films obtained by means of the convolution of the XPS curves
From: Morphological, compositional, structural, and optical properties of Si-nc embedded in SiO x films
Oxidation states | |||||
|---|---|---|---|---|---|
Temperature (°C) | dss (mm) | Peak position (eV) | |||
Si 0+ | Si 2+ | Si 3+ | Si 4+ | ||
1,400 | 2 | 99.08 | 101.06 | 102.16 | 102.95 |
1,300 | 3 | 99.67 | 101.98 | 103.01 | |
1,150 | 4 | 99.08 | 101.47 | 102.51 | 103.24 |
1,050 | 5 | 99.02 | 101.32 | 102.28 | 103.16 |
900 | 6 | 99.90 | 101.36 | 102.01 | 103.34 |