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Table 1 Synthesis conditions for the n-type silicon nanowires

From: Radial n-i-p structure SiNW-based microcrystalline silicon thin-film solar cells on flexible stainless steel

Condition

Value

SiH4 + PH3 flow rate

6 sccm + 6 sccm

H2 flow rate

60 sccm

Pressure

1.5 Torr

Substrate temperature

400°C

Radio frequency (13.56 MHz) power density

500 mW/cm2

  1. SiH4 gas is 100% pure, and PH3 gas is 99 % H2 diluted.

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