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Figure 2 | Nanoscale Research Letters

Figure 2

From: Composition profiling of inhomogeneous SiGe nanostructures by Raman spectroscopy

Figure 2

Composition profiling of a SiGe island. (a) Experimental (black) and reconstructed (red) Raman spectra. The blue spectra are the weighted ϕ x components. (b) Relative spectral contributions, a x , with respect to the composition. (c) Composition profile inside each island modeled as a multilayer. The distance from the substrate surface is z. The uncertainty on the thickness values by Raman spectroscopy is about 10% of the total thickness. The data are compared to AFM and X-ray[18] results of similar islands. In the inset of panel (c), the AFM profile of one island is reported.

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