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Table 2 RMS roughness for CuPc films after post-annealing for 1 h under vacuum

From: Growth and characterization of thin Cu-phthalocyanine films on MgO(001) layer for organic light-emitting diodes

Post-annealing effect  
Heating T (°C) RMS (nm) Figure
0 (as grown film) 2.05 ± 0.40 Figure 3a
150 1.79 ± 0.29 Figure 3b
250 0.89 ± 0.05 Figure 3c