Figure 3From: Transparent SiON/Ag/SiON multilayer passivation grown on a flexible polyethersulfone substrate using a continuous roll-to-roll sputtering systemX-ray diffraction analysis and HRTEM image. XRD plots of the R2R-grown SiON/Ag/SiON (Ag 12 nm) multilayer sputtered on a PES substrate as a function of the top and bottom SiON thickness. The inset shows the cross-sectional HRTEM image of the SiON (110 nm)/Ag (12 nm)/SiON (110 nm) multilayer.Back to article page