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Table 1 Summary of all the different sets of fabricated samples and process conditions

From: Metal work-function-dependent barrier height of Ni contacts with metal-embedded nanoparticles to 4H-SiC

Sample

NPs

Capping

layer

< 2R>

(nm)

σ

(nm)

NP

Annealing

Ref

-

Ni

-

-

-

NP-1

Au

Ni

40.5

11.7

500°C, 20 min

NP-2

Ag

Ni

36.1

10.3

500°C, 20 min

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