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Table 1 The AD parameters for the Al2O3-polyimide composite thick films

From: High loading of nanostructured ceramics in polymer composite thick films by aerosol deposition

Deposition conditions
Starting powder Ceramic: α-Al2O3
Polymer: polyimide
Substrate Cu and glass
Carrier gas He
Size of nozzle orifice 10 × 0.4 mm2
Scanning speed 1 mm/sec
Working pressure 6-8 Torr
Consumption of carrier gas 1-2 L/min
Distance between substrate and nozzle 10 mm
Deposition temperature Room temperature
Deposition time 10-40 min
Deposition area 10 × 10 mm2