Table 1 The AD parameters for the Al2O3-polyimide composite thick films
From: High loading of nanostructured ceramics in polymer composite thick films by aerosol deposition
Deposition conditions | |
|---|---|
Starting powder | Ceramic: α-Al2O3 Polymer: polyimide |
Substrate | Cu and glass |
Carrier gas | He |
Size of nozzle orifice | 10 × 0.4 mm2 |
Scanning speed | 1 mm/sec |
Working pressure | 6-8 Torr |
Consumption of carrier gas | 1-2 L/min |
Distance between substrate and nozzle | 10 mm |
Deposition temperature | Room temperature |
Deposition time | 10-40 min |
Deposition area | 10 × 10 mm2 |