Table 1 The measured layer thickness of films with indexes 1 to 5 grown on Si by SE
From: Optical and microstructural properties of ZnO/TiO2 nanolaminates prepared by atomic layer deposition
Sample ID | 1 | 2 | 3 | 4 | 5 |
|---|---|---|---|---|---|
1st layer-TiO2 | 18.85 | 8.85 | 5.87 | 4.23 | 2.73 |
1st layer-ZnO | 32.29 | 15.13 | 10.67 | 7.49 | 5.31 |
2nd layer-TiO2 | 8.97 | 4.81 | 4.15 | 2.47 | |
2nd layer-ZnO | 15.32 | 10.37 | 7.46 | 5.28 | |
3rd layer-TiO2 | 4.87 | 4.13 | 2.39 | ||
3rd layer-ZnO | 10.33 | 7.41 | 5.32 | ||
4th layer-TiO2 | 4.24 | 2.38 | |||
4th layer-ZnO | 7.45 | 5.28 | |||
5th layer-TiO2 | 2.38 | ||||
5th layer-ZnO | 5.29 | ||||
6th layer-TiO2 | 2.36 | ||||
6th layer-ZnO | 5.28 | ||||
Total thickness (nm) | 51.14 | 48.27 | 46.92 | 46.56 | 46.47 |