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Table 1 The measured layer thickness of films with indexes 1 to 5 grown on Si by SE

From: Optical and microstructural properties of ZnO/TiO2 nanolaminates prepared by atomic layer deposition

Sample ID 1 2 3 4 5
1st layer-TiO2 18.85 8.85 5.87 4.23 2.73
1st layer-ZnO 32.29 15.13 10.67 7.49 5.31
2nd layer-TiO2   8.97 4.81 4.15 2.47
2nd layer-ZnO   15.32 10.37 7.46 5.28
3rd layer-TiO2    4.87 4.13 2.39
3rd layer-ZnO    10.33 7.41 5.32
4th layer-TiO2     4.24 2.38
4th layer-ZnO     7.45 5.28
5th layer-TiO2      2.38
5th layer-ZnO      5.29
6th layer-TiO2      2.36
6th layer-ZnO      5.28
Total thickness (nm) 51.14 48.27 46.92 46.56 46.47