Table 1 Summary of estimated and measured thicknesses of TZO films with R 2 accuracy greater than 0.995
Sample | Number | Number of supercycle | Estimated thickness (nm) | True thickness (nm) |
|---|---|---|---|---|
ZnO | N/A | 500 | 100.0 | 106 ± 2.1 |
Zn/Ti = 20:1 | 20 | 25 | 100.8 | 101 ± 1.7 |
Zn/Ti = 10:1 | 10 | 50 | 101.5 | 95 ± 0.9 |
Zn/Ti = 5:1 | 5 | 100 | 103.0 | 94 ± 1.5 |
Zn/Ti = 2:1 | 2 | 250 | 107.5 | 84 ± 1.4 |
Zn/Ti = 1:1 | 1 | 500 | 115.0 | 80 ± 0.6 |