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Table 1 Summary of estimated and measured thicknesses of TZO films with R 2 accuracy greater than 0.995

From: Structural, electrical, and optical properties of Ti-doped ZnO films fabricated by atomic layer deposition

Sample Number Number of supercycle Estimated thickness (nm) True thickness (nm)
ZnO N/A 500 100.0 106 ± 2.1
Zn/Ti = 20:1 20 25 100.8 101 ± 1.7
Zn/Ti = 10:1 10 50 101.5 95 ± 0.9
Zn/Ti = 5:1 5 100 103.0 94 ± 1.5
Zn/Ti = 2:1 2 250 107.5 84 ± 1.4
Zn/Ti = 1:1 1 500 115.0 80 ± 0.6
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