Table 1 Results of the Hall measurement by van der Pauw method 1 cm × 1 cm size
Bulk concentration | Conductivity | Mobility | |
---|---|---|---|
(/cm3) | (/Ω cm) | (Vs/cm) | |
Si(100) | |||
U(100) | 2.7 × 1012 | 6.7 × 10-4 | 15,000 |
L(100) | 1.8 × 1015 | 9.8 × 10-2 | 350 |
H(100) | 6.0 × 1019 | 4.3 × 102 | 45 |
Si(111) | |||
U(111) | 1.0 × 1012 | 1.7 × 10-4 | 59 |
L(111) | 1.0 × 1015 | 6.1 × 10-2 | 370 |
H(111) | 3.4 × 1019 | 8.9 × 102 | 1,600 |