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Table 3 Calculated maximum donor-electron density, ρ max , and FWHM

From: Ab initio calculation of valley splitting in monolayer δ-doped phosphorus in silicon

Number of

ρ max

FWHM

layers

(×10−3e/Å)

(Å)

40

3.8

6.2

60

3.9

6.2

80

3.9

6.5

  1. Values are presented as a function of the number of layers in 1/4 ML-doped cells. The DZP basis set was used.

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