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Table 3 Calculated maximum donor-electron density, ρ max , and FWHM

From: Ab initio calculation of valley splitting in monolayer δ-doped phosphorus in silicon

Number of ρ max FWHM
layers (×10−3e/Å) (Å)
40 3.8 6.2
60 3.9 6.2
80 3.9 6.5
  1. Values are presented as a function of the number of layers in 1/4 ML-doped cells. The DZP basis set was used.