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Table 1 Comparison of the contact of a diamond tip on various silicon crystal planes

From: Effect of crystal plane orientation on the friction-induced nanofabrication on monocrystalline silicon

Sample

Si(100)

Si(110)

Si(111)

Contact area A (nm2)

8.86 × 103

7.61 × 103

7.17 × 103

Pressed volume V (nm3)

2.49 × 104

1.83 × 104

1.63 × 104

  1. The tip radius (R) is 500 nm, and the normal load (Fn) is 50 μN.

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