Table 1 Fabrication depths under various scanning loads and etching temperatures (nm)
From: Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching
Scanning load (μN) | 273 K | 293 K | 308 K | 318 K | 328 K |
|---|---|---|---|---|---|
5 | 1.21 | 1.20 | 1.15 | 1.22 | 1.16 |
8 | 1.62 | 1.65 | 1.64 | 1.61 | 1.67 |
12 | 2.01 | 2.13 | 2.05 | 2.05 | 2.15 |