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Table 1 Fabrication depths under various scanning loads and etching temperatures (nm)

From: Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching

Scanning load (μN) 273 K 293 K 308 K 318 K 328 K
5 1.21 1.20 1.15 1.22 1.16
8 1.62 1.65 1.64 1.61 1.67
12 2.01 2.13 2.05 2.05 2.15