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Table 2 Fitting results in Figure 6

From: Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching

Fn (μN) Ea (kJ/mol) A(c)α (nm/h)
5 48.3 2.3×108
8 52.0 1.7×109
12 51.3 2.1×109