Table 2 Fitting results in Figure 6
From: Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching
Fn (μN) | Ea (kJ/mol) | A(c)α (nm/h) |
|---|---|---|
5 | 48.3 | 2.3×108 |
8 | 52.0 | 1.7×109 |
12 | 51.3 | 2.1×109 |
From: Maskless and low-destructive nanofabrication on quartz by friction-induced selective etching
Fn (μN) | Ea (kJ/mol) | A(c)α (nm/h) |
|---|---|---|
5 | 48.3 | 2.3×108 |
8 | 52.0 | 1.7×109 |
12 | 51.3 | 2.1×109 |