Figure 12From: Electrical and optical properties of Al-doped ZnO and ZnAl2O4 films prepared by atomic layer depositionSEM images of the ZnO/Al 2 O 3 composite films with optimized ZnO/Al 2 O 3 monocycle ratio of 1:1. Samples were annealed at 700°C (a), 800°C (b), 1,000°C (c), and 1,100°C (d), respectively.Back to article page